SFS-EN ISO 19749:2023:en

Scope

This document specifies methods of determining nanoparticle size and shape distributions by acquiring and evaluating scanning electron microscope images and by obtaining and reporting accurate results. This document applies to particles with a lower size limit that depends on the required uncertainty and on the suitable performance of the SEM, which is to be proven first -according to the requirements described in this document. This document applies also to SEM-based size and shape measurements of larger than nanoscale particles.

The standards writing body responsible for this document in Finland is Mechanical Engineering and Metals Industry Standardization in Finland.

Table of contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions

3.1 General terms
3.2 Core terms: image analysis
3.3 Core terms: statistical symbols and definitions
3.4 Core terms: measurands and descriptors
3.5 Core terms: metrology
3.6 Core terms: scanning electron microscopy

4 General principles

4.1 SEM imaging
4.2 SEM image-based particle size measurements
4.3 SEM image-based particle shape measurements

5 Sample preparation

5.1 Sample preparation fundamental information
5.2 General recommendations
5.3 Ensuring good sampling of powder or dispersion-in-liquid raw materials
5.4 Ensuring representative dispersion
5.5 Nanoparticle deposition on a substrate
5.6 Number of samples to be prepared
5.7 Number of particles to be measured for particle size determination
5.8 Number of particles to be measured for particle shape determination

6 Qualification of the SEM for nanoparticle measurements
7 Image acquisition

7.1 General
7.2 Setting suitable image magnification and pixel resolution

8 Particle analysis

8.1 Particle analysis fundamental information
8.2 Individual particle analysis
8.3 Automated particle analysis
8.4 Automated particle analysis procedure example

9 Data analysis

9.1 General
9.2 Raw data screening: detecting touching particles, artefacts and contaminants
9.3 Fitting models to data
9.4 Assessment of measurement uncertainty

10 Reporting the results

Annex A Qualification of the SEM for nanoparticle measurements (normative)
Annex B Cross-sectional titanium dioxide samples preparation (informative)
Annex C Case study on well-dispersed 60 nm size silicon dioxide nanoparticles (informative)
Annex D Case study on 40 nm size titanium dioxide nanoparticles (informative)
Annex E Example for extracting particle size results of SEM-based nanoparticle measurements using ImageJ (informative)
Annex F Effects of some image acquisition parameters and thresholding methods on SEM particle size measurements (informative)
Annex G Example for reporting results of SEM-based nanoparticle measurements (informative)

Bibliography

Show all

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions

3.1 General terms
3.2 Core terms: image analysis
3.3 Core terms: statistical symbols and definitions
3.4 Core terms: measurands and descriptors
3.5 Core terms: metrology
3.6 Core terms: scanning electron microscopy

4 General principles

4.1 SEM imaging
4.2 SEM image-based particle size measurements
4.3 SEM image-based particle shape measurements

5 Sample preparation

5.1 Sample preparation fundamental information
5.2 General recommendations
5.3 Ensuring good sampling of powder or dispersion-in-liquid raw materials
5.4 Ensuring representative dispersion
5.5 Nanoparticle deposition on a substrate
5.6 Number of samples to be prepared
5.7 Number of particles to be measured for particle size determination
5.8 Number of particles to be measured for particle shape determination

6 Qualification of the SEM for nanoparticle measurements
7 Image acquisition

7.1 General
7.2 Setting suitable image magnification and pixel resolution

8 Particle analysis

8.1 Particle analysis fundamental information
8.2 Individual particle analysis
8.3 Automated particle analysis
8.4 Automated particle analysis procedure example

9 Data analysis

9.1 General
9.2 Raw data screening: detecting touching particles, artefacts and contaminants
9.3 Fitting models to data
9.4 Assessment of measurement uncertainty

10 Reporting the results

Annex A Qualification of the SEM for nanoparticle measurements (normative)
Annex B Cross-sectional titanium dioxide samples preparation (informative)
Annex C Case study on well-dispersed 60 nm size silicon dioxide nanoparticles (informative)
Annex D Case study on 40 nm size titanium dioxide nanoparticles (informative)
Annex E Example for extracting particle size results of SEM-based nanoparticle measurements using ImageJ (informative)
Annex F Effects of some image acquisition parameters and thresholding methods on SEM particle size measurements (informative)
Annex G Example for reporting results of SEM-based nanoparticle measurements (informative)

Bibliography

Product group(s)

07.120 Nanotechnologies »

Relationships

Normative references

ISO 13322-1:2014 Particle size analysis — Image analysis methods — Part 1: Static image analysis methods
ISO 16700:2016 Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
ISO 26824:2022 Particle characterization of particulate systems — Vocabulary

Show normative references associated with publication

ISO 13322-1:2014 Particle size analysis — Image analysis methods — Part 1: Static image analysis methods
ISO 16700:2016 Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
ISO 26824:2022 Particle characterization of particulate systems — Vocabulary
ISO 9276-1:1998 Representation of results of particle size analysis — Part 1: Graphical representation
ISO 9276-2:2014 Representation of results of particle size analysis — Part 2: Calculation of average particle sizes/diameters and moments from particle size distributions
ISO 9276-3:2008 Representation of results of particle size analysis — Part 3: Adjustment of an experimental curve to a reference model
ISO 9276-5:2005 Representation of results of particle size analysis — Part 5: Methods of calculation relating to particle size analyses using logarithmic normal probability distribution
ISO 9276-6:2008 Representation of results of particle size analysis — Part 6: Descriptive and quantitative representation of particle shape and morphology
ISO/IEC 17025:2017 General requirements for the competence of testing and calibration laboratories
ISO/IEC Guide 99:2007 International vocabulary of metrology — Basic and general concepts and associated terms (VIM)
ISO/TS 24597:2011 Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
ISO/TS 80004-1:2015 Nanotechnologies — Vocabulary — Part 1: Core terms
ISO/TS 80004-2:2015 Nanotechnologies — Vocabulary — Part 2: Nano-objects
ISO/TS 80004-3:2020 Nanotechnologies — Vocabulary — Part 3: Carbon nano-objects
ISO/TS 80004-4:2011 Nanotechnologies — Vocabulary — Part 4: Nanostructured materials
ISO/TS 80004-6:2021 Nanotechnologies — Vocabulary — Part 6: Nano-object characterization

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Technical committee

CEN/TC 352 Nanotechnologies »

Date of implementation

06.04.2023

Published

11.04.2023

Edition

1

Pages

79

Language(s)

English