ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
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Sisällysluettelo
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
4.1 Principles for establishing classification of clean surfaces in cleanrooms and controlled environments
4.2 Classification for surface cleanliness by chemical concentration
4.3 ISO-SCC designation
4.4 Converter for substances into surface atomic concentration
5 Measuring and monitoring the cleanliness of surfaces for chemical contamination and demonstration of compliance
5.1 Criteria for good cleanliness assessment
5.2 Documentation and reporting
Annex A Conversion between different unit expressions of surface concentration for chemical substances (informative)
Annex B Parameters influencing testing and interpretation of results (informative)
Annex C Essential considerations for a good cleanliness assessment (informative)
Annex D Methods for testing surface cleanliness by chemical concentration (informative)
ISO 14644-1:1999 Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness
ISO 14644-6:2007 Cleanrooms and associated controlled environments -- Part 6: Vocabulary
ISO 14644-1:1999 Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness
ISO 14644-6:2007 Cleanrooms and associated controlled environments -- Part 6: Vocabulary