1.1 This International Standard specifies methods for measuring the thickness of metallic coatings by the use of X-ray spectrometric methods. 1.2 The measuring methods to which this International Standard applies are fundamentally those that determine the mass per unit area. Using a knowledge of the density of the coating material, the results of measurements can also be expressed as linear thickness of the coating. 1.3 The measuring methods permit simultaneous measurement of coating systems with up to three layers, or simultaneous measurement of thickness and compositions of layers with up to three components. 1.4 The practical measurement ranges of given coating materials are largely determined by the energy of the characteristic X-ray fluorescence to be analysed and by the acceptable measurement uncertainty and can differ depending upon the instrument system and operating procedure used.
Tämän julkaisun valmistelusta Suomessa vastaa Metalliteollisuuden Standardisointiyhdistys ry, puh. 09 19 231 (vaihde).
Sisällysluettelo
Foreword
1 Scope
2 Terms and definitions
3 Principle
3.1 Basis of operation
3.2 Excitation
3.3 Dispersion
3.4 Detection
3.5 Thickness measurement
3.6 Absorber for secondary radiation
3.7 Mathematical deconvolution
3.8 Multilayer measurements
3.9 Alloy composition thickness measurement
4 Apparatus
5 Factors that influence the measurement results
5.1 Counting statistics
5.2 Calibration standards
5.3 Coating thickness
5.4 Size of measuring area
5.5 Coating composition
5.6 Coating density
5.7 Substrate composition
5.8 Substrate thickness
5.9 Surface cleanliness
5.10 Intermediate coatings
5.11 Specimen curvature
5.12 Excitation energy and excitation intensity
5.13 Detector
5.14 Radiation path
5.15 Conversion of count rate to mass per unit area or thickness
5.16 Tilt of specimen surface
6 Calibration of instrument
6.1 Introduction
6.2 Standards
6.3 Selection of standards
6.4 X-ray emission characteristics of standards
6.5 Substrate X-ray emission characteristics of thickness standards
6.6 Substrate thickness
7 Procedure
7.1 General
7.2 Collimator or aperture
7.3 Measurement of curved surfaces
7.4 Calibration checks
7.5 Measurement time
7.6 Number of measurements
7.7 Precautions
7.8 Expression of results
8 Measurement uncertainty
9 Test report
Annex A Typical measuring ranges for some common coating materials (informative)